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Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering

Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering
Authors:

B. Krause, S. Darma, M. Kaufholz, H. Gräfe, S. Ulrich, M. Mantilla, R. Weigel, S. Rembold, T. Baumbach 

Source:

Journal of Synchrotron Radiation 19, 216-222 

Date: 2012