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3D Reciprocal space mapping of diffuse scattering for the study of stacking faults in semipolar (11-22) GaN layers grown from sidewall of r- patterned sapphire substrate

3D Reciprocal space mapping of diffuse scattering for the study of stacking faults in semipolar (11-22) GaN layers grown from sidewall of r- patterned sapphire substrate
Authors:

Lazarev, S. Bauer

Source:

J. Appl. Cryst., 46, 1425

Date: 2013