 Dr. Martin Börner |
|
|
X-ray lithography martin boernerMdo4∂kit edu |
|
| author/s | title | source | date |
|---|---|---|---|
Giselbrecht, Stefan; Reinhardt, Martina; Mappes, Timo; Boerner, Martin; Gottwald, Eric; van Blitterswijk, Clemens; Saile, Volker; Truckenmueller, Roman |
Closer to Nature-Bio-inspired Patterns by Transforming Latent Lithographic Images | ADVANCED MATERIALS |
2011 |
Rashidian, Atabak; Klymyshyn, David M.; Boerner, Martin; Mohr, Juergen |
Deep x-ray lithography processing for batch fabrication of thick polymer-based antenna structures | JOURNAL OF MICROMECHANICS AND MICROENGINEERING |
2010 |
Kissling, Stephanie; Bade, Klaus; Boerner, Martin; Klymyshyn, David M. |
Electropolishing as a method for deburring high aspect ratio nickel RF MEMS | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS |
2010 |
Kenntner, J.; Grund, T.; Matthis, B.; Boerner, M.; Mohr, J.; Scherer, T.; Walter, M.; Willner, M.; Tapfer, A.; Bech, M.; Pfeiffer, F.; Zanette, I.; Weitkamp, T. |
Front and Backside Structuring of Gratings for Phase Contrast Imaging With X-ray Tubes | DEVELOPMENTS IN X-RAY TOMOGRAPHY VII |
2010 |
Bohling, Michael; Seiler, Thomas; Wdowiak, Boguslaw; Jahns, Juergen; Mohr, Juergen; Boerner, Martin |
Highly precise micro-retroreflector array fabricated by the LIGA process and its application as tapped delay line filter | APPLIED OPTICS |
2012 |
Jahns, Juergen; Seiler, Thomas; Mohr, Juergen; Boerner, Martin |
Micro-retroreflector array fabricated by the LIGA process | MICRO-OPTICS 2010 |
2010 |
Rashidian, Atabak; Klymyshyn, David M.; Aligodarz, Mohammadreza Tayfeh; Boerner, Martin; Mohr, Juergen |
Microwave performance of photoresist-alumina microcomposites for batch fabrication of thick polymer-based dielectric structures | JOURNAL OF MICROMECHANICS AND MICROENGINEERING |
2012 |
Rashidian, A.; Aligodarz, M. Tayfeh; Klymyshyn, D. M.; Boerner, M.; Mohr, J. |
Photodefinable Microcomposites for Antenna Applications | 2010 IEEE ANTENNAS AND PROPAGATION SOCIETY INTERNATIONAL SYMPOSIUM |
2010 |
Rashidian, Atabak; Klymyshyn, David M.; Aligodarz, Mohammadreza Tayfeh; Boerner, Martin; Mohr, Juergen |
Photoresist-Based Polymer Resonator Antennas: Lithography Fabrication, Strip-Fed Excitation, and Multimode Operation | IEEE ANTENNAS AND PROPAGATION MAGAZINE |
2011 |
Rashidian, A.; Klymyshyn, D. M.; Aligodarz, M. Tayfeh; Boerner, M.; Mohr, J. |
Photoresist-based polymer resonator antennas with permanent frame | ELECTRONICS LETTERS |
2012 |
Kinuta, Seichin; Saita, Yoshiaki; Kobayashi, Masashi; Boerner, Martin; Saile, Volker; Hosaka, Sumio |
Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS |
2010 |
Rashidian, A.; Klymyshyn, D. M.; Aligodarz, M. Tayfeh; Boerner, M.; Mohr, J. |
SU-8 Resonator Antenna | 2010 IEEE ANTENNAS AND PROPAGATION SOCIETY INTERNATIONAL SYMPOSIUM |
2010 |
Sun, Haohua; Kou, Bingquan; Xi, Yan; Qi, Juncheng; Sun, Jianqi; Mohr, Juergen; Boerner, Martin; Zhao, Jun; Xu, Lisa X.; Xiao, Tiqiao; Wang, Yujie |
The Recent Development of an X-ray Grating Interferometer at Shanghai Synchrotron Radiation Facility | INTERNATIONAL WORKSHOP ON X-RAY AND NEUTRON PHASE IMAGING WITH GRATINGS |
2012 |
Haluzan, Darcy T.; Klymyshyn, David M.; Achenbach, Sven; Boerner, Martin; Mohr, Juergen |
VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS |
2012 |
Klymyshyn, David M.; Boerner, Martin; Haluzan, Darcy T.; Santosa, Edwin Gono; Schaffer, Melissa; Achenbach, Sven; Mohr, Juergen |
Vertical High-Q RF-MEMS Devices for Reactive Lumped-Element Circuits | IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES |
2010 |
Klymyshyn, David M.; Mappes, Timo; Achenbach, Sven; Kachayev, Anton; Boerner, Martin; Mohr, Juergen |
X-ray fabrication of SAW resonators with narrow electrodes in thick high-aspect-ratio polymer templates | JOURNAL OF MICROMECHANICS AND MICROENGINEERING |
2010 |
Xi, Yan; Kou, Binquan; Sun, Haohua; Qi, Juncheng; Sun, Jianqi; Mohr, Juergen; Boerner, Martin; Zhao, Jun; Xu, Lisa X.; Xiao, Tiqiao; Wang, Yujie |
X-ray grating interferometer for biomedical imaging applications at Shanghai Synchrotron Radiation Facility | JOURNAL OF SYNCHROTRON RADIATION |
2012 |
