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Deep x-ray lithography processing for batch fabrication of thick polymer-based antenna structures

Deep x-ray lithography processing for batch fabrication of thick polymer-based antenna structures
Authors:

Rashidian, Atabak; Klymyshyn, David M.; Boerner, Martin; Mohr, Juergen

Source:

JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Date: 2010