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X-ray fabrication of SAW resonators with narrow electrodes in thick high-aspect-ratio polymer templates

X-ray fabrication of SAW resonators with narrow electrodes in thick high-aspect-ratio polymer templates
Authors:

Klymyshyn, David M.; Mappes, Timo; Achenbach, Sven; Kachayev, Anton; Boerner, Martin; Mohr, Juergen

Source:

JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Date: 2010