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Electropolishing as a method for deburring high aspect ratio nickel RF MEMS

Electropolishing as a method for deburring high aspect ratio nickel RF MEMS
Authors:

Kissling, Stephanie; Bade, Klaus; Boerner, Martin; Klymyshyn, David M.

Source:

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Date: 2010