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Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability

Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability
Authors:

Kinuta, Seichin; Saita, Yoshiaki; Kobayashi, Masashi; Boerner, Martin; Saile, Volker; Hosaka, Sumio

Source:

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Date: 2010