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Vertical High-Q RF-MEMS Devices for Reactive Lumped-Element Circuits

Vertical High-Q RF-MEMS Devices for Reactive Lumped-Element Circuits
Authors:

Klymyshyn, David M.; Boerner, Martin; Haluzan, Darcy T.; Santosa, Edwin Gono; Schaffer, Melissa; Achenbach, Sven; Mohr, Juergen

Source:

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES

Date: 2010