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VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers

VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers
Authors:

Haluzan, Darcy T.; Klymyshyn, David M.; Achenbach, Sven; Boerner, Martin; Mohr, Juergen

Source:

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Date: 2012