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Microwave performance of photoresist-alumina microcomposites for batch fabrication of thick polymer-based dielectric structures

Microwave performance of photoresist-alumina microcomposites for batch fabrication of thick polymer-based dielectric structures
Authors:

Rashidian, Atabak; Klymyshyn, David M.; Aligodarz, Mohammadreza Tayfeh; Boerner, Martin; Mohr, Juergen

Source:

JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Date: 2012