Home | Legals | Sitemap | KIT

Fabrication techniques for multiscale 3D-MEMS with vertical metal micro- and nanowire integration

Fabrication techniques for multiscale 3D-MEMS with vertical metal micro- and nanowire integration
Authors: F. Greiner, S. Quednau, F. Dassinger, R. Sarwar, H. F Schlaak, M. Guttmann, P. Meyer links:
Source: Journal of Micromechanics and Microengineering 23, 025018
Date: 2013