Home | Legals | Sitemap | KIT

Electropolishing as a method for deburring high aspect ratio nickel RF MEMS

Electropolishing as a method for deburring high aspect ratio nickel RF MEMS
Authors:

S. Kissling, K. Bade, M. Börner, D. M. Klymyshyn 

Source:

Microsystem Technologies - Micro- and Nanosystems. Information Storage and processing Systems 16 (2010) 1361-1367 

Date: 2010