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X-ray fabrication of SAW resonators with narrow electrodes in thick high-aspect-ratio polymer templates

X-ray fabrication of SAW resonators with narrow electrodes in thick high-aspect-ratio polymer templates
Authors:

D. M. Klymyshyn, T. Mappes, S. Achenbach, A. Kachayev, M. Börner, J. Mohr 

Source:

Journal of Micromechanics and Microengineering 20 (2010) 075031-1-6 

Date: 2010