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Deep x-ray lithography processing for batch fabrication of thick polymer-based antenna structures

Deep x-ray lithography processing for batch fabrication of thick polymer-based antenna structures
Authors:

A. Rashidian, D. M. Klymyshyn, M. Boerner, J. Mohr 

Source:

Journal of Micromechanics and Microengineering 20 (2010) 025026-1-11 

Date: 2010