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VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers

VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers
Authors:

D. T. Haluzan, D. M. Klymyshyn, S. Achenbach, M. Börner, J. Mohr 

Source:

Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems 18 (2012) 443-452 

Date: 2012