Home | Legals | Sitemap | KIT

Large tuning ratio high aspect ratio variable capacitors using leveraged bending

Large tuning ratio high aspect ratio variable capacitors using leveraged bending
Authors:

S. Achenbach, D. T. Haluzan, D. M. Klymyshyn, M. Börner, J. Mohr 

Source:

Microsyst. Technol. DOI 10.1007/s00542-013-1940-7 

Date: 2013