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Studies on Defect Reduction in AlGaN Heterostructures by Integrating an In-situ SiN Interlayer

Studies on Defect Reduction in AlGaN Heterostructures by Integrating an In-situ SiN Interlayer
Authors:

F. Scholz, K. Forghani, M. Klein, O. Klein, U. Kaiser, B. Neuschl, I. Tischer, M. Feneberg, K. Thonke, S. Lazarev, S. Bauer, T. Baumbach 

Source:

Japanese Journal of Applied Physics 52, 08JJ07-1-4 

Date: 2013