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Characterization of the carrot defect in 4H-SiC epitaxial layers

Characterization of the carrot defect in 4H-SiC epitaxial layers
Authors:

J. Hassan, A. Henry, P. J. McNally, J. P. Bergman 

Source:

Journal of Crystal Growth 312 (2010) 1828-1837 

Date: 2010