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Dislocation sources and slip band nucleation from indents on silicon wafers

Dislocation sources and slip band nucleation from indents on silicon wafers
Authors:

J. Wittge, A. N. Danilewsky, D. Allen, P. McNally, Z. Li, T. Baumbach, E. Gorostegui-Colinas, J. Garagorri, M. R. Elizalde, D. Jacques, M. C. Fossati, D. K. Bowen, B. K. Tanner 

Source:

Journal of Applied Crystallography 43 (2010) 1036-1039 

Date: 2010