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Nano-meter resolution X-ray topography (nm-XRT)

Nano-meter resolution X-ray topography (nm-XRT)
place:new ANKA seminar room, building 348, 2nd floor, entrance western side Affiliation:

Singapore Synchrotron Light Source (SSLS), National University of Singapore

Inviting person:Pawel Wesolowski, KIT-ANKA

Ping Yang

Time:11.00 a.m.


We have proposed Nano-meter resolution X-ray topography (nm-XRT). The principle and whole system will be reviewed (Fig. 1). More detailed info around a single defect and strain field with several tens of nm resolution can be achieved. The high spatial resolution for the method and system is limited by X-ray optic limitation, including the outer-most width in the objective FZP and coherence of incident X-rays. Using high quality and high-resolution FZPs and high coherent X-ray sources can overcome it. There is no better way compatible to have so high-resolution X-ray topography than this invention.
The crystal samples can diffract incident X-rays in either transmission or reflection geometry. So the topography can be realized in transmission or reflection geometry in conjunct with transmission X-ray microscopy (TXM). Actually TXM serves as an analyzer to obtain XRT image. The feasibility has been tested in reflection geometry respectively using “half-field” (shielded) mode [1] and scan mode [2], from which the practical resolution of 0.5 µm was obtained.
1. H.H. Solak, C. David, J. Gobrecht and M. Drakopoulos, J. Phys. D, Appl. Phys. 36 (2003) A128–A132.
2. R. Tanuma and T. Kubo, Japanese Journal of Applied Physics, 45(2006)5280–5282.
Fig. 1:

ANKA seminar 12.09.2013