Accelerator Test Facility and Synchrotron Radiation Source at KIT

Electropolishing as a method for deburring high aspect ratio nickel RF MEMS

  • Authors:

    S. Kissling, K. Bade, M. Börner, D. M. Klymyshyn 

  • Source:

    Microsystem Technologies - Micro- and Nanosystems. Information Storage and processing Systems 16 (2010) 1361-1367 

  • Date: 2010