Accelerator Test Facility and Synchrotron Radiation Source at KIT

Deep x-ray lithography processing for batch fabrication of thick polymer-based antenna structures

  • Authors:

    A. Rashidian, D. M. Klymyshyn, M. Boerner, J. Mohr 

  • Source:

    Journal of Micromechanics and Microengineering 20 (2010) 025026-1-11 

  • Date: 2010