Accelerator Test Facility and Synchrotron Radiation Source at KIT

VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers

  • Authors:

    D. T. Haluzan, D. M. Klymyshyn, S. Achenbach, M. Börner, J. Mohr 

  • Source:

    Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems 18 (2012) 443-452 

  • Date: 2012