Accelerator Test Facility and Synchrotron Radiation Source at KIT

Large tuning ratio high aspect ratio variable capacitors using leveraged bending

  • Authors:

    S. Achenbach, D. T. Haluzan, D. M. Klymyshyn, M. Börner, J. Mohr 

  • Source:

    Microsyst. Technol. DOI 10.1007/s00542-013-1940-7 

  • Date: 2013