Accelerator Test Facility and Synchrotron Radiation Source at KIT

Fast and accurate X-ray lithography simulation enabled by using Monte Carlo method. New version of DoseSim: a software dedicated to deep X-ray lithography (LIGA)

  • Authors:

    P. Meyer 

  • Source:

    Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems 18 (2012) 1971-1980 

  • Date: 2012