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Angle-resolved X-ray reflectivity measurements during off-normal sputter deposition of VN

Angle-resolved X-ray reflectivity measurements during off-normal sputter deposition of VN
Authors:

B. Krause, M. Kaufholz, S. Kotapati, R. Schneider, E.Müller, D. Gerthsen, P.Wochner, T. Baumbach

Source:

Surface & Coatings Technology 277 (2015) 52–57

Date: 2015