We have proposed Nano-meter resolution X-ray topography (nm-XRT). The principle and whole system will be reviewed (Fig. 1). More detailed info around a single defect and strain field with several tens of nm resolution can be achieved. The high spatial resolution for the method and system is limited by X-ray optic limitation, including the outer-most width in the objective FZP and coherence of incident X-rays. Using high quality and high-resolution FZPs and high coherent X-ray sources can overcome it. There is no better way compatible to have so high-resolution X-ray topography than this invention.
The crystal samples can diffract incident X-rays in either transmission or reflection geometry. So the topography can be realized in transmission or reflection geometry in conjunct with transmission X-ray microscopy (TXM). Actually TXM serves as an analyzer to obtain XRT image. The feasibility has been tested in reflection geometry respectively using “half-field” (shielded) mode  and scan mode , from which the practical resolution of 0.5 µm was obtained.
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