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Study of threading dislocation density reduction in AIGaN epilayers by Monte-Carlo simulation of high resolution reciprocal space maps of two layer system

Study of threading dislocation density reduction in AIGaN epilayers by Monte-Carlo simulation of high resolution reciprocal space maps of two layer system
Authors: S. Lazarev, M. Barchuk, S. Bauer, V. Forghani, V. Holý, F. Scholz, T. Baumbach
Source: Journal of Applied Crystallography  46,
120-127
Date: 2013