Dislocation generation related to micro-cracks in Si wafers: High temperature in situ study with white beam X-ray topography
| Authors: | A. Danilewsky, J. Wittge, A. Hess, A. Cröll, D. Allen, P. McNally, P. Vagovic, A. Cecilia, Z. Li, T. Baumbach, E. Gorostegui-Colinas, M. R. Elizalde | ||
|---|---|---|---|
| Source: | Nuclear Instruments and Methods in Physics Research B 268 (2010) 399-402 | ||
| Date: | 2010 | ||
