Accelerator Test Facility and Synchrotron Radiation Source at KIT

Non-Invasive Nano-Imaging of Ion implanted and Activated Copper in Silicon

  • Authors:

    F. Ballout, J.-S. Samson, D. A. Schmidt, E. Bründermann, Y.-L. Mathis, B. Gasharova, A. D. Wieck, M. Havenith 

  • Source:

    Journal of Appled Physics 110 (2011) 024307-1-7 

  • Date: 2011