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Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability

Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability
Authors:

S. Kinuta, Y. Saita, M. Kobayashi, M. Boerner, V. Saile, S. Hosaka 

Source:

Microsystem Technologies - Micro- and Nanosystems. Information Storage and processing Systems 16 (2010) 1299-1302 

Date: 2010