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Fast and accurate X-ray lithography simulation enabled by using Monte Carlo method. New version of DoseSim: a software dedicated to deep X-ray lithography (LIGA)

Fast and accurate X-ray lithography simulation enabled by using Monte Carlo method. New version of DoseSim: a software dedicated to deep X-ray lithography (LIGA)
Authors:

P. Meyer 

Source:

Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems 18 (2012) 1971-1980 

Date: 2012