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X-ray diffraction Imaging of dislocation generation related to microcracks in Si wafers

X-ray diffraction Imaging of dislocation generation related to microcracks in Si wafers
Authors:

J. Wittge, A. N. Danilewsky, D. Allen, P. McNally, Z. J. Li, T. Baumbach, E. Gorostegui-Colinas, J. Garagorri, M. R. Elizalde, D. Jacques, M. C. Fossati, D. K. Bowen, B. K. Tanner 

Source:

Powder Diffraction 25 (2010) 99-103 

Date: 2010