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Three dimensional X-ray diffraction imaging of process-indused dislocation loops in silicon

Three dimensional X-ray diffraction imaging of process-indused dislocation loops in silicon
Authors:

D. Allen, J. Wittge, J. Stopford, A. N. Danilewsky, P. McNally 

Source:

Journal of Applied Crystallography 44 (2011) 526-531 

Date: 2011