Accelerator Test Facility and Synchrotron Radiation Source at KIT

X-ray fabrication of SAW resonators with narrow electrodes in thick high-aspect-ratio polymer templates

  • Authors:

    D. M. Klymyshyn, T. Mappes, S. Achenbach, A. Kachayev, M. Börner, J. Mohr 

  • Source:

    Journal of Micromechanics and Microengineering 20 (2010) 075031-1-6 

  • Date: 2010